IEC 62047-3:2006 PDF | Request Standard
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IEC 62047-3:2006

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

Standard by IEC, 2006-08-15

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About This Item

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IEC 62047-3:2006 defines a technical reference for semiconductor devices and micro-electromechanical devices, specifically a thin film standard test piece for tensile testing. It is relevant where laboratories, design teams, and procurement functions need a consistent basis for material and device characterization in micro-scale mechanical evaluation. By aligning tensile test preparation and interpretation around a shared reference, the document supports documented evaluation, technical validation, and more reliable comparison of results across engineering and quality workflows.

Purpose of IEC 62047-3:2006

The purpose of IEC 62047-3:2006 is to establish a standardized thin film test piece for tensile testing within the context of micro-electromechanical devices. This helps organizations reduce variation in laboratory evaluation and improve the repeatability of mechanical characterization results. For teams involved in technical assessment or conformity assessment preparation, the document provides a stable reference point for comparing test outcomes, supporting engineering documentation, and aligning verification activities with a common testing approach.

Compliance applications of IEC 62047-3:2006

IEC 62047-3:2006 is commonly used in testing workflows for semiconductor and MEMS-related development, qualification, and quality assurance activities where tensile behavior of thin films must be assessed in a controlled way. It may support supplier review, product evaluation, and internal validation programs when organizations need defensible test documentation for engineering decisions. The reference is also useful in regulated or audit-facing environments where operational consistency, traceable methods, and clear technical review are important to compliance workflows.

Benefits of IEC 62047-3:2006

Using IEC 62047-3:2006 can improve testing consistency and reduce ambiguity in thin film tensile testing for micro-electromechanical devices. That supports safer engineering decisions, better comparability between laboratories, and more efficient procurement review when a documented technical reference is required. It may also help teams strengthen risk management, streamline conformity assessment preparation, and maintain better alignment between design validation and quality workflows. For organizations managing technical compliance, it offers a practical basis for repeatable and reviewable test activity.

  • Standardized thin film test piece reference for tensile testing in MEMS and semiconductor contexts
  • Useful for laboratory evaluation, engineering validation, and comparison of mechanical test results
  • Supports documented evaluation and technical review in quality and compliance workflows
  • Helps reduce variability when preparing test methods or reviewing supplier data
SKU: 97ca83a30e7b

  • Publication Date: 2006-08-15
  • Standard Status: Original
  • Publisher: IEC
  • Edition: 1

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