TS EN 62047-22 PDF | Request Standard

TS EN 62047-22

Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates

This part of IEC 62047 specifies a tensile test method to measure electromechanical
properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on
non-conductive flexible substrates. Conductive thin-film structures on flexible substrates are
extensively utilized in MEMS, consumer products, and flexible electronics. The electrical
behaviours of films on flexible substrates differ from those of freestanding films and
substrates due to their interfacial interactions. Different combinations of flexible substrates
and thin films often lead to various influences on the test results depending on the test
conditions and the interfacial adhesion. The desired thickness of a thin MEMS material is
50 times thinner than that of the flexible substrate, whereas all other dimensions are similar to
each other.

Standard by TSE, 24.12.2014

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TS EN 62047-22 is a standard for an electromechanical tensile test method used to evaluate conductive thin films on flexible substrates in the micro-electromechanical systems field. Its technical focus is the way electrical response changes as the film-substrate assembly is mechanically strained, which is a central issue for flexible MEMS and related devices.

In general technical terms, conductive thin films used in flexible electronics and MEMS are not judged by mechanical strength alone. Their resistance or electrical behaviour may vary under stretch, bend, and repeated deformation, and the bonded substrate can strongly influence the measured response. Compared with freestanding films, supported films experience interfacial constraints, adhesion effects, and substrate-driven strain transfer, so tensile testing is used to observe the coupled mechanical and electrical behaviour in a controlled way.

According to the scope, this part of IEC 62047 applies to conductive thin micro-electromechanical materials bonded on non-conductive flexible substrates. The scope also notes that the relative thickness and size relationship between the thin film and the flexible substrate can affect test results, meaning specimen geometry, loading conditions, and interface quality are important to interpretation. In practice, the document provides a common test framework for a very specific class of layered specimens rather than for generic thin films in free-standing form.

  • The film and the flexible substrate are assessed as an assembly, not as an isolated film.
  • The method is intended to measure electromechanical properties under tensile loading.
  • Interfacial interaction and adhesion can influence the measured outcome.
  • Typical application areas include MEMS, consumer products, and flexible electronics.
  • The standard targets supported conductive thin films rather than free-standing films.
SKU: ab437ead767c

  • Publication Date: 24.12.2014
  • Standard Status: U (Yürürlükteki Standard/Standard)
  • Publisher: TSE
  • Document Language: en
  • ICS Classification: 01.080.99 Diğer Grafik Semboller
  • Pages: 29
  • Source Standard: EN 62047-22:2014
  • International Equivalents: EN 62047-22-EQV; IEC 62047-22:-EQV

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